I experienced a similar problem with A Fanuc AF4000E resonator in an Amada Pulsar 2415NT. About 3 months (2500 hours) after we got the machine all the fold mirrors in the resonator exhibited the same type of problem you are describing. The problem was caused by an improper laser gas mix due to a leak at the laser gas bottle regulator. The carbon dioxide, nitrogen and helium in the laser gas all leak at different rates resulting in improper laser gas ratios. The solution for us was to replace all the fold mirrors, laser gas regulator, hoses and fittings. Once everything was replaced we carefully checked for any laser gas leaks before running the machine. Since then the machine has not had any problems with the fold mirrors in 6+ months.