This is a tariff defined quantity, at least for the deposit. You need to get the Open Access Transmission Tariff (i.e. the OATT) for the utility you plan on interconnecting to. A phone call will get you the deposit numbers.
It does make a difference if you are a small generator, or a large generator trying to interconnect. The cutoff is 20 MW.
There are three studies that you need to provide deposits for, presuming you carry the project forward through all three phases:
1. Feasibility Study: typical deposits are around $10K
2. System Impact Study: typical deposits are around $25K
3. Facility Study: typical deposits are around $50K to $100K
Note that if you cannot demonstrate site control you will likely have to deposit an additional non-refundable deposit for the Facility Study phase.
Also, you will pay ACTUAL costs...usually this means you pay in addition to the deposit, however, I have seen several instances where part of the deposit was refunded.
I would budget for at least $250K to get through the study process...if you were risk averse then perhaps $500K might be a more appropriate number. This is for a large generation interconnection--a small generator interconnection (not under PURPA though) is less money.
The rough rule of thumb is that studies and direct assigned transmission costs should not exceed 10% of the project cost.