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Etching AlN-Al composites

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Cleopatra

Materials
Joined
Jan 5, 2003
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10
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DE
How can I etch AlN-Al composites? Is it possible to etch it thermally or do I have to do it by chemically?

Any information is appreciated. Thanks.
 
For AlN Murakami's solution works well. i'll try that before anythign else.
 
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