I'm not really clear what you are asking. Assuming the walls will rest on the mat, and transfer loads to the mat, what you describe is the common practice. The image was not explanatory - it looks like a plan view with CMU walls at the perimeter. There are always issues with construction tolerances, but unless small variations are truly an issue, I would not concern myself with minor irregularities in how the walls and foundation align at the face of the wall.