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Automated Wet Etch Station in semiconductor wafer processing

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sb00

sb00

Chemical
Joined
Jun 25, 2003
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22
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Hi,
I am doing some research in Automated Wet-Etch Station Scheduling. Can someone please help me with industrial data and description? I have gone through some journal papers, however, no concrete data is available. I would like to know 1. the processing times of wafers/carriers in baths 2. the individual transfer times inside the AWS 3. how criticial is AWS in terms of decreasing the makespan of wafer manufacturing process?
Thanks
 
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