Reason why the SEMI F20 standard puts a limit to the grain size of SS 1

AnsAvi · Jul 16, 2018

Hi,

I am new to the semiconductor industry. Hence the question. What is the reason behind the SEMI F20 standard (applicable to material used in Semiconductor Industry) recommends that the grain size of the material should be size 4 or finer? If the smaller grains size material meets the strength and chemistry requirements, Is that not sufficient?

Thanks!

MagBen · Jul 18, 2018

316L is used for majority of gas delivery systems in Semiconductor industry. the components of gas delivery are typically machined, electropolished and welded. Grain size not only directly affects strengths, but also affects machinability, electropolishing, or even weldability. Smaller grain would normally be better in all perspectives.

AnsAvi · Jul 18, 2018

Thanks MagBen!

Dalinus · Jul 19, 2018

From original question I am not sure, if it is clear for AnsAvi, that higher number means smaller grain size.

AnsAvi · Jul 19, 2018

Dalinus,

I appreciate you checking. I do understand the relationship between grain size and grain size number.

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Reason why the SEMI F20 standard puts a limit to the grain size of SS 1

AnsAvi

Materials

MagBen

Materials

AnsAvi

Materials

Dalinus

Materials

AnsAvi

Materials

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