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Suppliers for wet etch chucks for MEMS?

Suppliers for wet etch chucks for MEMS?

Suppliers for wet etch chucks for MEMS?

(OP)
Does anyone know suppliers info for wet etch chucks for MEMS?
I'd like to know what companies are supplying chucks that protect one side of a wafer from the chemical during wet processes(such as acid or alkali solutions).

Thanks,
dalnim

RE: Suppliers for wet etch chucks for MEMS?

Usually, you have an oxide for etch protection.  The backside of a wafer is too rough to seal against a chuck for etch resistance.

TTFN

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