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Suppliers for wet etch chucks for MEMS?

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dalnim

dalnim

Materials
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Aug 20, 2007
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Does anyone know suppliers info for wet etch chucks for MEMS?
I'd like to know what companies are supplying chucks that protect one side of a wafer from the chemical during wet processes(such as acid or alkali solutions).

Thanks,
dalnim
 
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Usually, you have an oxide for etch protection. The backside of a wafer is too rough to seal against a chuck for etch resistance.

TTFN

FAQ731-376
 
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