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pre etching sensing

pre etching sensing

pre etching sensing

Is there any sensors that will detect pre-sputtered wafers before they enter into a oxide etch chamber? (for the purpose of damage limitation to the etch process kit)

RE: pre etching sensing

Your question is unclear.  Don't your operators have eyeballs?


RE: pre etching sensing

Yes they have eyes, paid enough to care-no any other intelligent suggestions??

RE: pre etching sensing

If you don't give meaningful information, how do you expect to get meaningful answers?


RE: pre etching sensing

My apologies, the information I am looking for is a sensor capable of detecting approx a 1000 angstrom layer of metal on a silicon wafer (and not detect a bare silicon wafer)as it enters the toolset before it enters an etching chamber, and etches the metal off the wafer which in turn destroys the chamber kit.
I'm not sure if I can make it any clearer than this, but in general a sensor that will detect a very small layer of metal and will be oblivious to silicon??

RE: pre etching sensing

Is there some reason you can't use a standard metal film thickness monitor?


RE: pre etching sensing

A metal thickness film monitor is good if everyone adheres to it, because this isn't possible unless a Nazi regime is in control, I would prefere a sensor that I can integrate into my machine that would stop progress of any metal dep'd wafers?

RE: pre etching sensing

I've worked in a fab, so I find your comment simply unbelieveable.  Unless ALL the process is followed rigorously, you get a huge pile of expensive sand.  

If the operators are that unreliable, the production line is doomed and there will no longer be a viable customer to sell to.

In any case, if you want to add the cost and complexity, then you shuold integrated the film thickness monitor into your machine's processing.


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