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Looking for thin (pref. capacitive) wafer sensor

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JubilationTCornpone

Electrical
Joined
Sep 17, 2001
Messages
18
Location
NL
Hello, all. I'm looking for a very thin sensor that I can use for detecting silicon wafers. It is to be used in a robotic end-effector for the semiconductor industry.

I had previously planned on using a thin capacitive sensor which was to be offered by a certain vendor. Since then, I've been told that this sensor might not be offered after all, so I need to start looking for alternatives.

Help?
 
Check out OMRON and Keyence for Wafer mapping
Pepperul Fulsch for wafer sensing.
Robot End affector for wafer normally uses vaccuum. Is this for edge grip applications ?
 
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