Back in 2002, Medical Device & Diagnostic Industry magazine had an article that explored various sterilization techniques on Parylene. One of the tests studied moisture vapor transmission (also called permeability) during steam sterilization.
They found a 43% change (I'm not sure, but I think they mean change in volume) with Parylene-N and a 5% change (deemed statistically insignificant) with Parylene-C. However they found a 17% change in tensile strength with Parylene-C and none with Parylene-N.
I admit this isn't a clear-cut answer for you, but hopefully it'll help.