Hello Everybody
I am working on the depdition of Diamond like Carbon (DLC), using Plasma enhanced Chemical Vapor Depostion (PECVD) on substrates made from glass or silicon using acetylene as a precursor. My problem is that the resulted carbon is in the form of large particles (abut 3 mm)that are not actually deposited on the substrates. I don't know what i do wrong. Would anyone here please help me by pointing to the suspected causes for such a problem. your cooperation is highly appreciated.