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Depositing DLC layers by Plasma enhanced CVD

Depositing DLC layers by Plasma enhanced CVD

Depositing DLC layers by Plasma enhanced CVD


Hello Everybody

I am working on the depdition of Diamond like Carbon (DLC), using Plasma enhanced Chemical Vapor Depostion (PECVD) on substrates made from glass or silicon using acetylene as a precursor. My problem is that the resulted carbon is in the form of large particles (abut 3 mm)that are not actually deposited on the substrates. I don't know what i do wrong. Would anyone here please help me by pointing to the suspected causes for such a problem. your cooperation is highly appreciated.

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