I used to work with BF3. What a nasty chemical! Be careful with it. Allied Signal was my supplier back then. (Honeywell now??). They recommended the following:
On/Off valves: Needle or Globe Type. Aluminum Silicon bronze or Stainless Steel.
Throttling Valve: Globe valves with Hastelloy C-276 or Alloy 400.
Pressure Regulators: Hastelloy C-276, Alloy 400, Kel-F or PFTE. Orifice should be a minimum 3/16".
Piping: 316L SS Schedule 80.
Gaskets: Metal Reinforced PTFE (pressure < 300 psig) Nickel Graphite spiral wound (pressure > 300 psig