Tek-Tips is the largest IT community on the Internet today!

Members share and learn making Tek-Tips Forums the best source of peer-reviewed technical information on the Internet!

Register Log in
  • Congratulations MintJulep on being selected by the Eng-Tips community for having the most helpful posts in the forums last week. Way to Go!

Vacuum leakage?

Status
Not open for further replies.
frankplay

frankplay

Electrical
Joined
Mar 2, 2005
Messages
1
Location
US
Hi. Guys:
I have an old PECVD system to set up. Huge leakage in load chamber. Can not pump down under 100 Torr. Rough pump is verified good. I tried alchol and N2. But I could not find obvious leakage. Anyway you can suggest? Thank you.
 
Sort by date Sort by votes

I don't know if smoke could contaminate your system, but sometimes I test with incense to find out vacuum leakage.
 
Upvote 0 Downvote
Status
Not open for further replies.

Similar threads

A
  • Locked
  • Question Question
Liquid ring vacuum pump dealing with air,water vapour, alcohol and oil
Replies
2
Views
2K
pierreick
pierreick
Sam1390
  • Locked
  • Question Question
Anaerobic Digester Vacuum relief valve
Replies
13
Views
1K
georgeverghese
georgeverghese
rstor
  • Locked
  • Question Question
Acid to clean Alkaline battery leakage
Replies
2
Views
365
bimr
bimr
98769876
  • Locked
  • Question Question
Flashing in a vacuum filer
Replies
1
Views
143
25362
25362
jpolise
  • Locked
  • Question Question
Liquid ring vacuum pumps
Replies
1
Views
255
RaRo
RaRo

Part and Inventory Search

Sponsor

Back
Top