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Vacuum leakage?

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frankplay

frankplay

Electrical
Joined
Mar 2, 2005
Messages
1
Location
US
Hi. Guys:
I have an old PECVD system to set up. Huge leakage in load chamber. Can not pump down under 100 Torr. Rough pump is verified good. I tried alchol and N2. But I could not find obvious leakage. Anyway you can suggest? Thank you.
 
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I don't know if smoke could contaminate your system, but sometimes I test with incense to find out vacuum leakage.
 
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