Vacuum flow measurement

[SAK9]

Hi Guys,

What kind of an instrument can I use to measure flow in a pipe which is under a vacuum of 28"(G)?

 

[MortenA]

if there IS a flow to measure then most systems will work in vacuum the way the work normally.

Best Regards

Morten

 

[zdas04]

Morten is right on--at 28" there aren't many molecules to measure. When I get much below 10" I'm figuring that that inflow to the process is pretty close to zero.

 

[SAK9]

Thanks for your posts,any idea what cfm/point should I consider for a process vacuum system for a semiconductor facility?I have about 200 points?What is the guide line on any use factor to be considered?