Plasma etching

[Jim85]

Looking for some help.

I am doing some research in to the effects of plasma etching on phenolic resin. Does anyone work with this kind of process? I would like to know the chemical breakdown of the reaction taking place and how much energy a process like this may use?

Also, what are the environmental impacts of plasma etching? Can the waste be disposed of in an environmentally friendly manner?

Any information would be great, also if anyone can recommend any websites/papers please point me in the right direction.

Thanks,

Jamie

 

[hacksaw]

grab a vacuum system handbook, the field is 50 years old

you have several forms, with the right gas mix you can reduce organics to basic products of combustion

 

[Jim85]

Thanks Hacsaw,

Where would I find one of these handbooks?

 

[Jim85]

Could you also provide me with the author?

 

[hacksaw]

start with a search of your topic "plasma etch"