RF Matching network help

rajappa · Apr 7, 2003

Hello,

I would like to know some useful sources (websites/books) from which I can get information on RF plasma generators and matching networks. I am having difficulty with tuning my Matching network (to lower the reflected power). I am guessing that my network is at its capacitance limit, but I would like to know more details so that I can look for a better MN. Thanks a lot.

Rajappa

electricuwe · Apr 8, 2003

Usually a matching network should provide some form of feedback (e.g. position of capacitors) to the user. Have you checked the manual if such information is provided ?

Some matchings available on the market contain coils with several taps. Maybe its usefull to change the tap ? Does the manual contain information on this ?

Post manufacturer and type of the matching. Maybe I can supply further information ?

rajappa · Apr 8, 2003

Thanks for your reply.
Unfortunately, I dont have the manual, its a system I had borrowed it from someone else,and I need to return it. However, before buying a new one, I wanted to know some of the technology. I believe this is a capacitance controlled network, manufactured by RF Plasma Products.

Thanks
Rajappa

hacksaw · May 3, 2003

the first step is to characterize your load. Have you done that?

electricuwe · May 4, 2003

hacksaw,

you are right, and the easiest way to do this is to calculate the load impedance from the compoment values and capacitor positions of a matching which is able to match the load to the users requirement.

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