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Four Point Probe

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Engineering1969

Electrical
Joined
Jul 29, 2020
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1
Location
DE
Dear Ladys and Gentlemans,

I want to measure the sheet resistance R_square on a printing produkt.
My measuring equipment consists a SMU to supply and measure and a four point Probe by Jandel.
As output size I get the electrical resistance R.
So I have to multiply the geometric factor and a correction factor (correction factor because the width is small)

The derivation for the geometric factor I have found on :

And the correction factor table is shown here, in my case its on page 54

Funny but true, I get twice the value than in the reference measurement system (eddy current technology)
So may we can discuss why?
And the bigger Question: why is the resistance calculated in the derivation with U/2I.
In my opinion there is no superposition of currents because they have a different sign. (look at the attachment)

Thank you in advance

 
What is the layer itself? Is it uniform resistivity? The 4-point probe method assumes a uniform material.

Is the eddy current system correctly configured/calibrated for thin layers?

TTFN (ta ta for now)
I can do absolutely anything. I'm an expert! faq731-376 forum1529 Entire Forum list
 
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