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Particle Improvement comparison

Particle Improvement comparison

Particle Improvement comparison

I have been planning to conduct an experiment to compare a particle performance on our CVD chamber between a new and old process. But the problem is that the particle event is random and unpredictable, how do we I determine the optimum sample size for this kind of evaluation

RE: Particle Improvement comparison

Hi IRStuff,

Basically lets say that I have a new process that I am trying to compare its particle performance with my existing process. THe existing process seems to show intermittent particle failure that is very hard to determine its rate. How do I determine whether the sample size that I am using for the comparison is sufficient between the two process. Since even the standard process the failure is quite intermittent.

RE: Particle Improvement comparison

Surely, you have data on how often you have failures on your current process. This sets the baseline, and you need to have some idea of the confidence level you want in the conclusion. I know it's supposed to involve Chi-square statistics, but I think that the reliability exponential failure rate equation could be used here.

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