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In situ particle monitoring

thread233-369963

In situ particle monitoring

In situ particle monitoring

(OP)
I am re-starting thread234-262936: In Situ Particle Monitoring for in situ particle monitoring. I have many years of experience in the use of HYT in situ vacuum particle sensors and have installed the sensors in many Semiconductor Fab applications. The HYT system is very reliable but excessive heat can reduce the laser life significantly. I have a number of sensors, controllers, cables and software for any application. Please let me know if you have any questions regarding the technology. I would be glad to help.
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RE: In situ particle monitoring

Is there any Insitu Particle Monitoring available for Low Vacuum Pressure process?So far I haven't encounter any company offering this type of solution. Most of the ISPM can only be use for high pressure process

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