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Spin Coating PEDOT PSS

Spin Coating PEDOT PSS

Spin Coating PEDOT PSS

I have got a Si wafer 4" in diameter. I am cleaning it using Piranha solution. I am spin coating water soluble PEDOT:PSS on top of it with static dispensing ( I am dispensing the material around 5ml before the spin starts). The material I deposit covers the substarte completely. I am spinning at the speed of 4000 rpm for 1min.

The issue is I am always getting comet tail defect or streak through out the wafer after spinning.

Before spin coating I am using syringe filter to filter out the particles from the solution. I am using a laurell 400 lte spin coater without a fragment adapter. I am just lying the wafer on chuck as the wafer is too big.

Please help. Your suggestions are highly appreciated. Please let me know IF I am doing anything wrong.

Best Regards

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