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In Situ Particle Monitoring

In Situ Particle Monitoring

In Situ Particle Monitoring

I work in vacuum coating, but not in the semiconductor industry.  I'm hoping someone here may be able to help be out.  I am looking for an in situ particle monitor for a vacumm system.  The simplest of these system are a laser which traverses an opening.  Particles pass through the opening and scatter the laser beam.

A bit of research shows that High Yield Technology (HYT) manufactured something exactly like what I want (HYT Model 10, Model 20, Model 25SX etc).  But HYT has been bought so many times since then, I can't find information on who, if anyone stills makes that product.  Inficon also makes a laser vacuum particle detector, called Stiletto.  I have spoken with them about their system, but it's not exactly what I want, it is designed primarily to to go in pumping lines, I want a detect right in the chamber.

Are there other options out their I'm missing?  What does  the semiconductor industry use for in situ particle monitoring?


RE: In Situ Particle Monitoring


Thanks for the link.  I will look into getting a used HYT particle counter.  Do you know, are they not manufactured anymore?

RE: In Situ Particle Monitoring

I don't know; I've not been involved in semiconductors for more tha 20 yrs.  You might query that recycledgoods company.


FAQ731-376: Eng-Tips.com Forum Policies

RE: In Situ Particle Monitoring


Hach has stopped production of the HYT probes, but they are still supporting them.  I have bought a used system, but I'd still be interested in hearing from people in semiconductor as too whether there is anything similar being made right now.


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