BrunoPuntzJones
Materials
- Oct 27, 2005
- 189
I work in vacuum coating, but not in the semiconductor industry. I'm hoping someone here may be able to help be out. I am looking for an in situ particle monitor for a vacumm system. The simplest of these system are a laser which traverses an opening. Particles pass through the opening and scatter the laser beam.
A bit of research shows that High Yield Technology (HYT) manufactured something exactly like what I want (HYT Model 10, Model 20, Model 25SX etc). But HYT has been bought so many times since then, I can't find information on who, if anyone stills makes that product. Inficon also makes a laser vacuum particle detector, called Stiletto. I have spoken with them about their system, but it's not exactly what I want, it is designed primarily to to go in pumping lines, I want a detect right in the chamber.
Are there other options out their I'm missing? What does the semiconductor industry use for in situ particle monitoring?
Thanks,
BrunoPuntzJones
A bit of research shows that High Yield Technology (HYT) manufactured something exactly like what I want (HYT Model 10, Model 20, Model 25SX etc). But HYT has been bought so many times since then, I can't find information on who, if anyone stills makes that product. Inficon also makes a laser vacuum particle detector, called Stiletto. I have spoken with them about their system, but it's not exactly what I want, it is designed primarily to to go in pumping lines, I want a detect right in the chamber.
Are there other options out their I'm missing? What does the semiconductor industry use for in situ particle monitoring?
Thanks,
BrunoPuntzJones
