I work in vacuum coating, but not in the semiconductor industry.  I'm hoping someone here may be able to help be out.  I am looking for an in situ particle monitor for a vacumm system.  The simplest of these system are a laser which traverses an opening.  Particles pass through the opening and scatter the laser beam.

A bit of research shows that High Yield Technology (HYT) manufactured something exactly like what I want (HYT Model 10, Model 20, Model 25SX etc).  But HYT has been bought so many times since then, I can't find information on who, if anyone stills makes that product.  Inficon also makes a laser vacuum particle detector, called Stiletto.  I have spoken with them about their system, but it's not exactly what I want, it is designed primarily to to go in pumping lines, I want a detect right in the chamber.

Are there other options out their I'm missing?  What does  the semiconductor industry use for in situ particle monitoring?

Thanks,
BrunoPuntzJones