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Help on Chemical Vapour Deposition. How is it done?

Help on Chemical Vapour Deposition. How is it done?

Help on Chemical Vapour Deposition. How is it done?

I am working at a company where CVD is used as a coating method. We do TiN, Al2O3 coatings on carbides.
I wanted to know more about the technology. I know a bit about temperature and pressure requirements and equipments used. But I am not clear about the actual reactions taking place inside the reactor. Could you please throw some light on this aspect?

RE: Help on Chemical Vapour Deposition. How is it done?

Get your equipment suppliers technical manuals.

RE: Help on Chemical Vapour Deposition. How is it done?

but there are no reactions mentioned in the equipment suppliers technical manuals.
It contains all the information on other technical aspects such as electricals, mass flow controllers etc. I could also find process flow diagrams and all except the reactions and things like mass balances etc. A standard set of gas flows temperatures and pressures are given. I could figure out the reactions from them but I am not sure whether those are correct.   

RE: Help on Chemical Vapour Deposition. How is it done?

Things have changed as the CVD equipment we had there was a great deal of information in the technical manual. The caveat being that at the time they were fewer materials amendable to CVD. I have never seen a complete list of all reactants with chemical and physical parameters of the deposition reactions.

Here is a short introduction to CVD and few reactions.


If you want to really get involved in the chemistry of CVD here is a good starting point from Time Domain.


Here is the complete package.


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