Best method for digitizing existing mask
Best method for digitizing existing mask
(OP)
Hi, I'm researching the best methods for digitizing an existing mask. The mask shop we use indicates they cannot "blow-back" anything smaller than 2um and I'm dealing with .9um technology. I have been playing with stitching and converting microscope images however somthing tells me theres a better way. Any experts on the subject?
RE: Best method for digitizing existing mask
TTFN
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RE: Best method for digitizing existing mask
RE: Best method for digitizing existing mask
Have you tried any other mask shop?
Barring that, your only other choice might be to find someone with a laser profilometer and have them scan and stitch something together. This could be a problem if the die size is large, though.
Are you wanting simply to make modifications to a single, existing layer? If so, you might be able to get your mask vendor to do a 1x copy of the mask to a new mask, then, before photodevelopment, add in the changes directly to the photoresist.
TTFN
FAQ731-376: Eng-Tips.com Forum Policies
RE: Best method for digitizing existing mask
RE: Best method for digitizing existing mask
If you're talking die shrink, then you'd need to not only digitize, but convert to CAD format, since the scan format is probably not going to be the same as the raster format for the mask generator.
The other issue might be any built-in process compensations, which you'd need to undo or redo for the new process.
That's all assuming that the die shrink is drastic. If it's only 10-20%, people used to be able to get away with a straight photoshrink of their existing masks, and living with any issues with mask compensations or smaller bonding pads.
TTFN
FAQ731-376: Eng-Tips.com Forum Policies
RE: Best method for digitizing existing mask