gettering
Materials
- Sep 22, 2006
- 4
Hi,
I'm looking for chemical solution to remove Cr or Cr2O3 on silicon wafer selectively. I just tried using HF to remove it, but it didn't work well. Could you recommend me some chemical solution?
Thank you.
YK
I'm looking for chemical solution to remove Cr or Cr2O3 on silicon wafer selectively. I just tried using HF to remove it, but it didn't work well. Could you recommend me some chemical solution?
Thank you.
YK