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chemical solution to remove Cr or Cr2O3 on silicon wafer surface

thread116-166047

chemical solution to remove Cr or Cr2O3 on silicon wafer surface

chemical solution to remove Cr or Cr2O3 on silicon wafer surface

(OP)
Hi,

I'm looking for chemical solution to remove Cr or Cr2O3 on silicon wafer selectively. I just tried using HF to remove it, but it didn't work well. Could you recommend me some chemical solution?

Thank you.

YK
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RE: chemical solution to remove Cr or Cr2O3 on silicon wafer surface

I would try some oxidizing solution like hypochlorite or hydrogen peroxide to oxidate chromium to soluble chromium(VI) compounds.
Hope this will inspire some new ideas for you.   

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