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chemical solution to remove Cr or Cr2O3 on silicon wafer surface

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gettering

gettering

Materials
Sep 22, 2006
4
Hi,

I'm looking for chemical solution to remove Cr or Cr2O3 on silicon wafer selectively. I just tried using HF to remove it, but it didn't work well. Could you recommend me some chemical solution?

Thank you.

YK
 
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I would try some oxidizing solution like hypochlorite or hydrogen peroxide to oxidate chromium to soluble chromium(VI) compounds.
Hope this will inspire some new ideas for you.
 
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