What does "large process window" mean?

[oranjeep]

I am reading an article on copper damascene and CMP.
The article states, "Damascene technology using chemical mechanical polishing is the best way for copper patterning (that part I understand) with a large process window."

 

[IRstuff]

Usually, such a term refers to the amount of variability that a process can tolerate while still producing results that are acceptable.

TTFN

 

[oranjeep]

Thanks. This term was used in regards to wafer polishing.
Can "large process window" or simply "process window" be used figuratively with other manufactureing processes?
What would be an example of a "large process window" as oposed to a "small process window"? I have always thought of "window" to be a time limiting factor terminology. For example, "We have a 30 minute window to launch...."

 

[xnuke]

The term "window" is used with many different processes (not just manufacturing) to mean the range of parameter variation that produces an acceptable result or product. The parameters could be physical like temperature or temporal in nature. For example, a launch window is selected based on timing the rotation of the earth and other factors with achieving a desired orbit or intercept course with a satellite. This allows the launch organization to complete their mission with a minimum expenditure of resources, such as time, money, fuel, staffing, etc.

A large process window would be controlling the temperature and humidity of a clean room at 65-75 F (70+/-5) and 35-45 %RH (40+/-5).

A small process window would be controlling the same room at 68-72 F (70+/-2) and 38-42 %RH (40+/-2).

It's easy to see that the smaller process window has tighter acceptable tolerances.





xnuke

Please see FAQ731-376 for tips on how to make the best use of Eng-Tips.

 

[oranjeep]

Thanks. That clarifies things.