There are a lot of factors to consider before offering any suggestions. The typical vacuum/pressure range, normal RGA analysis, piping size and components, layout of valves and testing ports, diagnostic equipment available, etc. If you can post this info here, some general suggestions on a starting point might be useful.
If you can't post any detailed process info because of proprietary considerations, I would be willing to sign an NDA and then offer some general diagnostic approaches.
Vacuum is a strange animal and the absolute pressure ranges and chemical components change the behaviors greatly. One technique will not help in all processes.
rushmwr@yahoo.com