Temperature Monitor Through A Microscope?

[Point35]

I have a requirement to measure the real time temperature of a semiconductor manufacturing process but not just the global wafer temperature but individual structure on the chip. I have succesfully arranged visual optics with a focal length of 20cms capable of 5um resoulution looking in the window of the vacuum chamber, but I am told this I would need a Ge lense assembly for IR camera measurment.

An optical pyrometer using a quartz rod on to the back of the wafer would give me a spot temp but is it possible to use an optical pyrometer through the microscope set up and does anyone know of a company that could supply a soultion?

Thanks for any advice.

 

[IRstuff]

Optical pyrometers require the object to be emitting significant amounts of visible light. This means that the object needs to be above about 700ºC.

TTFN

 

[JKEngineer]

There is a commercially available IR microscope, which I have heard discussed (about 5 years ago). I don't have the details handy. (Sorry - let me know if it is something you want to pursue.)

There are also "closeup" and microscope lenses for commercial infrared cameras. I know FLIR offers them, I believe others do as well. They may come close to what you want.

The window of the vacuum chamber will need to be IR transparent or you will not be able to use the camera.

Note that the resolution available to IR is less than that available to visible because of the longer wavelength.

It sounds as though you are new to IR and need help. If you would like more specific help setting up your system or developing an alternate approach, let me know.
Jack

Jack M. Kleinfeld, P.E. Kleinfeld Technical Services, Inc.
Infrared Thermography, Finite Element Analysis, Process Engineering

http://www.KleinfeldTechnical.com

 

[Point35]

Thank you for you replies.

Yes I am very new to IR measurement and I will contact you Jack.

For IRstuff, I have been using the NTM3 pyrometer system very successfully for a high density plasma silicon application at 175oC. They spec the range as 200oC - 600oC, I am sure I am not getting the full resolution but it has been giving me repeatable results. Whither it is a true pyrometer in the traditional sense I am not sure.

http://www.polytec-pi.fr/CI-SYSTEMS/temprature_monitoring_menu.html

Thanks again.

 

[IRstuff]

The NTM3 does not appear on the CI Systems website, so it's not clear whether it's like the NTM1, which has both near and traditional infrared sensing. The near infrared mode, I'm guessing, is based on the movement of the silicon absorption edge and apparently uses and active source.

However, since the accessory interfaces are either quartz or sapphire, then it's no more than mid-wave infrared and using a quartz or sapphire window and optics should work.

Your visible optics may work OK, if you're using the active mode, although, your focus and resolution will need to be corrected for the wavelength of operation. If you're using the passive mode, which, I'm guessing, is mid-waVE infrared,, your visible optics will not work.

TTFN

 

[JKEngineer]

Point35 -
I will look forward to your contact.

IRStuff -
Where on the site did you find the information about their systems in even that detail? I looked and only saw a very brief description.

Jack

Jack M. Kleinfeld, P.E. Kleinfeld Technical Services, Inc.
Infrared Thermography, Finite Element Analysis, Process Engineering

http://www.KleinfeldTechnical.com

 

[IRstuff]

Jack,

I cheated and went directly to th CI Systems website:

http://www.ci-semi.com/interfaces.asp?id=6

TTFN

 

[JKEngineer]

IRstuff -
Thanks! ;-)

Jack M. Kleinfeld, P.E. Kleinfeld Technical Services, Inc.
Infrared Thermography, Finite Element Analysis, Process Engineering

http://www.KleinfeldTechnical.com