Patyuchenko
Electrical
- Aug 4, 2006
- 17
I am trying to implement thermal simulation of a simplified model of a microchip. The geometry of the chip includes very thin volumes (their thickness is small in comparison with their length and width) which represent depletion regions of transistors, i.e. the heat sources. These volumes are surrounded by another volume which represents the shallow trench isolation.
The problem is in the following: when I try to substract these thin volumes from the big volume I get a message that the obtained entity is identical to the initial one. I tried to adjust tolerances for Boolean operations but it gave no success.
The only thing which helped is the change of the thicknesses of the thin volumes: initialy it is about 10 nm and when I change it into 30 nm then the volumes can be substracted (the width and length of the volumes are 1 um and 15 um correspondenly) but doing so I destroy the real geometry of the model what is not desirable.
Has anyone solved a similar problem? You would help me a lot.
Here, with the same simulation, I encountered another problem connected with existence of gray areas in Results Viewer. I will create a new thread on this issue. If anyone faced the same problem I will be very grateful to you for your help.
The problem is in the following: when I try to substract these thin volumes from the big volume I get a message that the obtained entity is identical to the initial one. I tried to adjust tolerances for Boolean operations but it gave no success.
The only thing which helped is the change of the thicknesses of the thin volumes: initialy it is about 10 nm and when I change it into 30 nm then the volumes can be substracted (the width and length of the volumes are 1 um and 15 um correspondenly) but doing so I destroy the real geometry of the model what is not desirable.
Has anyone solved a similar problem? You would help me a lot.
Here, with the same simulation, I encountered another problem connected with existence of gray areas in Results Viewer. I will create a new thread on this issue. If anyone faced the same problem I will be very grateful to you for your help.