RF matching network help

[rajappa]

Hello,

I would like to know some useful sources (websites/books) from which I can get information on RF plasma generators and matching networks. I am having difficulty with tuning my Matching network (to lower the reflected power). I am guessing that my network is at its capacitance limit, but I would like to know more details so that I can look for a better MN. Thanks a lot.
Rajappa

 

[StoneCold]

rajappa RF generators and matching networks are used extensively in PECVD (plasma enhanced chemical vapor deposition) reactors. You might be able to talk to the technical people at Applied Materials or ASM or Novellus and ask them who the experts are.

Good luck