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  1. zacks01

    PECVD recipe to obtain high refractive index

    Hello all, I'm new here to eng-tips.com website. I have a question regarding PECVD ( Plasma Enhanced Chemical Vapor Deposition). How to obtain high refractive index with knowing the ratio of combination of gas SiH4 & N2O in terms of flow rate (sccm) ? I'm trying to grow a SiO ( silicon oxide)...

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