Hi.
Probably the "7.13 Sample Piezoelectric Analysis" from "Coupled-Field Analysis Guide" would help. Especially the part where they set up the local coordinate systems.
Hello, I want to simulate the stress-strain state of silicon chip with thin dielectric membrane. The process of manufacturing includes:
1 substrate, 400 um
2 oxidizing, 0.5 um
3 nitride deposition, 0.5 um
4 Al deposition, 0.5 um
5 deep silicon etch, 400 um
The sizes of chip - rectangle 4x4 mm...
