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  1. L

    Calculation of Orifice Diameter for Flow Restrictor (OF) in a Semiconductor Vertical Furnace System

    Hi Pierre, Thank you for the reference. However, regarding products from China, especially in the semiconductor industry, there aren't many reliable brands from Henan that can meet the required standards. Best regards, LI Fei
  2. L

    Calculation of Orifice Diameter for Flow Restrictor (OF) in a Semiconductor Vertical Furnace System

    Flow Limitation in Case of Regulator Failure: If the pressure regulator or flow controller fails (e.g., fails open), the flow restrictor acts as a physical limitation to prevent an excessive flow rate. This is critical in systems where safety, precision, and preventing overloading are essential...
  3. L

    Calculation of Orifice Diameter for Flow Restrictor (OF) in a Semiconductor Vertical Furnace System

    System Description: This PID diagram is used in a vertical furnace system for semiconductor production equipment. The gas used is high-purity N₂, with an inlet pressure below 1 MPa. The system is designed to control the N₂ flow rate to 10 L/min. How can the orifice diameter of the flow...

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