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  1. saikin84

    stress strain state after deposition processes

    Hello, I want to simulate the stress-strain state of silicon chip with thin dielectric membrane. The process of manufacturing includes: 1 substrate, 400 um 2 oxidizing, 0.5 um 3 nitride deposition, 0.5 um 4 Al deposition, 0.5 um 5 deep silicon etch, 400 um The sizes of chip - rectangle 4x4 mm...

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