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  1. bedewy

    Depositing DLC layers by Plasma enhanced CVD

    Hello Everybody I am working on the depdition of Diamond like Carbon (DLC), using Plasma enhanced Chemical Vapor Depostion (PECVD) on substrates made from glass or silicon using acetylene as a precursor. My problem is that the resulted carbon is in the form of large particles (abut 3 mm)that...

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