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Recent content by ChrisPark

  1. ChrisPark

    KOH - backside etch - frontside protection

    Thanks guys, I found a company which provides mechanical fixtures for wafers. These fixtures keep one side dry while exposing the other to KOH. They also offer systems for electrochemical etch-stop to control the membrane thickness. (check ammt.com) http://www.ammt.com
  2. ChrisPark

    KOH - backside etch - frontside protection

    Hi all, I'm planning on a process where I want to create membranes in a KOH etch from the back side but the front-side is already structured and must remain dry. I want to control the membrane thickness (~18µ) optically. Does anyone have experience with such a process or knowledge on the...
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