×
INTELLIGENT WORK FORUMS
FOR ENGINEERING PROFESSIONALS

Log In

Come Join Us!

Are you an
Engineering professional?
Join Eng-Tips Forums!
  • Talk With Other Members
  • Be Notified Of Responses
    To Your Posts
  • Keyword Search
  • One-Click Access To Your
    Favorite Forums
  • Automated Signatures
    On Your Posts
  • Best Of All, It's Free!
  • Students Click Here

*Eng-Tips's functionality depends on members receiving e-mail. By joining you are opting in to receive e-mail.

Posting Guidelines

Promoting, selling, recruiting, coursework and thesis posting is forbidden.

Students Click Here

Jobs

Cesium in Si Implants

Cesium in Si Implants

Cesium in Si Implants

(OP)
Hi all,
        I have seen lots of implants, B11, Bf2, P, As, O2, etc. but I recently have seen a Cesium implant into standard Si wafers. Anybody know what this Implant is for?
                        elf

RE: Cesium in Si Implants

do you have a reference?  

Most sources show cesium used to sputter implanted Si wafers for characterizing shallow implants of boron and arsenic

TTFN

RE: Cesium in Si Implants

(OP)
Hi IR,
        Sound like some kind of Ion Mass Analysis, I thought most labs used Argon for the sputtering part of that process. This process though is in a production Lab. After what you wrote I'm beginning to think that this might be a pre etch conditioning Implant. Process Engineers in the past have used heavy Ion Implants (BF2) to increase etching rates in certain areas of the wafer (step edges and such). Ce @ 133amu is certainly Heavy enough to do some serious damage.

RE: Cesium in Si Implants

Yah, they mostly talking about secondary ion mass spectrometry (SIMS)

TTFN

Red Flag This Post

Please let us know here why this post is inappropriate. Reasons such as off-topic, duplicates, flames, illegal, vulgar, or students posting their homework.

Red Flag Submitted

Thank you for helping keep Eng-Tips Forums free from inappropriate posts.
The Eng-Tips staff will check this out and take appropriate action.

Reply To This Thread

Posting in the Eng-Tips forums is a member-only feature.

Click Here to join Eng-Tips and talk with other members!


Resources