oxide growth temperatures
oxide growth temperatures
(OP)
why is it that oxides grown at lower temperatures have higher defect concentrations to that of oxides grown at higher temperatures??
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RE: oxide growth temperatures
Don't forget that the oxide grows at the interface between the silicon and the oxide. So in addition to the above, the availability of oxygen at the interface is more limited at lower temperatures, so you might expect more voids, while at higher temperatures there may be an excess of oxygen
TTFN