What does "large process window" mean?
What does "large process window" mean?
(OP)
I am reading an article on copper damascene and CMP.
The article states, "Damascene technology using chemical mechanical polishing is the best way for copper patterning (that part I understand) with a large process window."
The article states, "Damascene technology using chemical mechanical polishing is the best way for copper patterning (that part I understand) with a large process window."





RE: What does "large process window" mean?
TTFN
RE: What does "large process window" mean?
Can "large process window" or simply "process window" be used figuratively with other manufactureing processes?
What would be an example of a "large process window" as oposed to a "small process window"? I have always thought of "window" to be a time limiting factor terminology. For example, "We have a 30 minute window to launch...."
RE: What does "large process window" mean?
A large process window would be controlling the temperature and humidity of a clean room at 65-75 F (70+/-5) and 35-45 %RH (40+/-5).
A small process window would be controlling the same room at 68-72 F (70+/-2) and 38-42 %RH (40+/-2).
It's easy to see that the smaller process window has tighter acceptable tolerances.
xnuke
Please see FAQ731-376 for tips on how to make the best use of Eng-Tips.
RE: What does "large process window" mean?