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Measuring the resistivity of thin layers

Measuring the resistivity of thin layers

Measuring the resistivity of thin layers

(OP)
Hello,

Here is my problem: I have a thin layer of SiC over a Carbon composite. The resistivity of Carbon composite as well as the one of SiC is not determined. Overall resistivity of a sample (20x20x2) I can define through  the "van der Pauw" method, but their individual resistivities, are still a problem.
The thickness of the SiC layer is 100ยต and the composite inside is 2-D woven.

So, has someone an idea?

Greetings,
Bojan Jokanovic- Germany

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