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Plasma Ashing Temperatures

Plasma Ashing Temperatures

(OP)
I have a few similar questions to thread135-368808: Plasma Etching/Ashing. I am looking to do some plasma ashing but I am not sure about the temperature. The machine that I am looking to use to do the ashing is a Plasma Etch machine but it does not have temperature control on it.

How important is temperature control for the ashing process? Do I need to get a better machine to heat the chamber? Has anyone here done a lot of ashing?

The Plasma Etch site has a lot of information but nothing about temperature control for ashing.


Thanks!

Scott

RE: Plasma Ashing Temperatures

Plasma etch is a very low temp process, they do it on common plastics all of the time to clean and promote adhesion.
All of the units that I have seen are rated for a few hundred watts, not much heating with that.
If you are looking to clean a surface heating isn't critical.
The oxygen plasma is highly reactive and will remove any organics that are present.

= = = = = = = = = = = = = = = = = = = =
P.E. Metallurgy, Plymouth Tube

RE: Plasma Ashing Temperatures

(OP)
Thank you Ed. I was able to run a few trials on a similar machine and the results look positive!

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