Plasma Ashing Temperatures
Plasma Ashing Temperatures
(OP)
I have a few similar questions to thread135-368808: Plasma Etching/Ashing. I am looking to do some plasma ashing but I am not sure about the temperature. The machine that I am looking to use to do the ashing is a Plasma Etch machine but it does not have temperature control on it.
How important is temperature control for the ashing process? Do I need to get a better machine to heat the chamber? Has anyone here done a lot of ashing?
The Plasma Etch site has a lot of information but nothing about temperature control for ashing.
Thanks!
Scott
How important is temperature control for the ashing process? Do I need to get a better machine to heat the chamber? Has anyone here done a lot of ashing?
The Plasma Etch site has a lot of information but nothing about temperature control for ashing.
Thanks!
Scott





RE: Plasma Ashing Temperatures
All of the units that I have seen are rated for a few hundred watts, not much heating with that.
If you are looking to clean a surface heating isn't critical.
The oxygen plasma is highly reactive and will remove any organics that are present.
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P.E. Metallurgy, Plymouth Tube
RE: Plasma Ashing Temperatures