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Vacuum flow measurement

Vacuum flow measurement

Vacuum flow measurement

(OP)
Hi Guys,

What kind of an instrument can I use to measure flow in a pipe which is under a vacuum of 28"(G)?

RE: Vacuum flow measurement

if there IS a flow to measure then most systems will work in vacuum the way the work normally.

Best Regards

Morten

RE: Vacuum flow measurement

Morten is right on--at 28" there aren't many molecules to measure.  When I get much below 10" I'm figuring that that inflow to the process is pretty close to zero.

RE: Vacuum flow measurement

(OP)
Thanks for your posts,any idea what cfm/point should I consider for a process vacuum system for a semiconductor facility?I have about 200 points?What is the guide line on any use factor to be considered?

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