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Looking for thin sensor for detecting silicon wafers

Looking for thin sensor for detecting silicon wafers

Looking for thin sensor for detecting silicon wafers

(OP)
Hello, all.  I'm looking for a very thin sensor that I can use for detecting silicon wafers.  It is to be used in a robotic end-effector for the semiconductor industry.

I had previously planned on using a thin capacitive sensor which was to be offered by a certain vendor.  Since then, I've been told that this sensor might not be offered after all, so I need to start looking for alternatives.

Help?

RE: Looking for thin sensor for detecting silicon wafers

You did not mention what size wafer you
are handling nor the task you will be
implementing to handle the wafers, but
I think you should be glad that you can't
use the capacitive sensors.  I doubt this
type of sensor would be accurate enough
for your purposes.  I think you can use
low power laser and sensor pairs to find
rough position/proximity, and since you
will probably "effecting" with a vacuum
paddle from the backside of the wafer, you
can monitor vacuum manifold pressure for
a spike indicating contact.  You might want
to add an audio sensor to monitor ambient
noise for the sound of shattered wafers(g).

RE: Looking for thin sensor for detecting silicon wafers

(OP)
Actually, we're NOT using a vacuum paddle, and we can't use a laser sensor either, due to intellectual property considerations).  That's why I'm looking for a thin capacitive sensor.  We've been forced to abandon all those other solutions.

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