Vacuum Pumping Systems
Vacuum Pumping Systems
(OP)
I'm trying to design a very basic load lock system and I'm trying to research possible vacuum accumulator sizes that I can pair with it.
Does anyone know of a source or cite that has information on vacuum accumulators or buffers?
Thanks in advance
Does anyone know of a source or cite that has information on vacuum accumulators or buffers?
Thanks in advance





RE: Vacuum Pumping Systems
A little looking around various links at
http
may reveal Your needs.
At 74th year working on IR-One2 PhD from UHK - - -