Nitrogen Specification for Maximum Argon Impurity?
Nitrogen Specification for Maximum Argon Impurity?
(OP)
Hello,
i' ve been trying to find a specification for nitrogen usage in a fab that has requirements for max argon concentrations. So far i wasn't able to find a reference to argon impurity for nitrogen.
Does anyone have a suggestion? The fab is a semiconductor one.
Thanks!
i' ve been trying to find a specification for nitrogen usage in a fab that has requirements for max argon concentrations. So far i wasn't able to find a reference to argon impurity for nitrogen.
Does anyone have a suggestion? The fab is a semiconductor one.
Thanks!
Process - Piping
ing - EiT





RE: Nitrogen Specification for Maximum Argon Impurity?
Unless it has changed there is a max number given like 3 ppm of an impurity. This means that there can never be over 3 ppm of said impurity in the gas and is more than likely none. You normally have to go with your supplier since analysing for these low impurity limits is very expensive.
I would definitely look at this the Scott site as they are speciality gas suppliers.
http://www.scottsemicon.com/index.html
RE: Nitrogen Specification for Maximum Argon Impurity?
I did check out some suppliers, but so far couldn't find one that mentions argon impurity in its nitrogen spec. Thing is, our customer has such requirement..
Process - Piping
ing - EiT
RE: Nitrogen Specification for Maximum Argon Impurity?
Looking at Matheson's spec's they offer individual cylinder analysis for a small fee. So you need to call them with your specification and see if they can meet it and how much it will cost to report the Argon content.
https:
If you can comeback with your client's specification for Argon it might open up the possibilities of having a N2 purifier or a N2 Generator.