Residual stress induced by metal deposition on cantilever
Residual stress induced by metal deposition on cantilever
(OP)
Hi,
Everyone, now I am trying to deposite some metal layers on micro-scale cantilever surface on the purpose of bending it under the residual stress caused by metal deposition. I read some literatures which mentioned and even gave the exact value of residual stress happened in both the cantilever and metal layer. So I wonder how to get those values by calculation if the deposition is through sputtering system or by any experimental ways.
Thank you.
Everyone, now I am trying to deposite some metal layers on micro-scale cantilever surface on the purpose of bending it under the residual stress caused by metal deposition. I read some literatures which mentioned and even gave the exact value of residual stress happened in both the cantilever and metal layer. So I wonder how to get those values by calculation if the deposition is through sputtering system or by any experimental ways.
Thank you.





RE: Residual stress induced by metal deposition on cantilever
As you cool the part the thermal contraction causes the stiffer material to bend the other material. Influencing factors are the amount of temperature change, modulus of each layer (flexural modulus) and the thickness of each layer. To calculate it properly I think you'd need to know the modulus of each material at every temperature experienced during cooling. That's what he measured in the above thesis by curing in a rheometer.
Rather than calculate it which requires a lot of time and measurement you would probably be better off experimenting until you get the degree of bend you need annd knowing that it's the above mentioned factors that affect the deformation.
There is not any memory with less satisfaction than the memory of some temptation we resisted.
- James Branch Cabell
RE: Residual stress induced by metal deposition on cantilever
But is there any equation including the residual stress as a function of your mentioned parameters, i.e. chamber geometry, pressue. As I can't conduct the work without any theory support.
RE: Residual stress induced by metal deposition on cantilever
There is no way to connect that with your chamber geometry or pressure without lots of experiments. The deformation depends on the properties of the layer you are depositing so you need to know the modulus, thickness and CTE of that. Only then you can correlate the deposition condictions with the properties of the metal layer.
There is not any memory with less satisfaction than the memory of some temptation we resisted.
- James Branch Cabell
RE: Residual stress induced by metal deposition on cantilever
What you want to accomplish requires a trial and error approach. One factor you can control is to flex the beam before you deposit anything. When you release the fixturing there will be stored stress in your deposited layer.
RE: Residual stress induced by metal deposition on cantilever
I don't have the exact formula here, but this is a quite simple formula that you must find on the net. If you can't find it, it must be easy to find...
RE: Residual stress induced by metal deposition on cantilever
There is not any memory with less satisfaction than the memory of some temptation we resisted.
- James Branch Cabell