Fillet For Silicon Micro cantilever beam
Fillet For Silicon Micro cantilever beam
(OP)
Is there any desing guideline for fillet radius for silicon micro beam used for MEMS application. Any idea?
Regards,
San07gita
Regards,
San07gita
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Fillet For Silicon Micro cantilever beam
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RE: Fillet For Silicon Micro cantilever beam
RE: Fillet For Silicon Micro cantilever beam
However, it might still pay to stress the beam properly. Even at MEMS scales classical stress concentrations occur.
If so, then you will need an allowable stress for whatever operations the beam is performing in whatever crystal direction is along the beam, and then assess what permissible stress concentration (times the basic beam stress) can occur.
As jedward points out, manufacturing such a feature accurately is another issue.
RE: Fillet For Silicon Micro cantilever beam
Horizontally, you're limited by the as-etched radius, which is usually a sizable fraction of the smallest linewidth already. Most beams are designed to accommodate the stresses by reducing the flex through a longer arm.
TTFN
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