pre etching sensing
pre etching sensing
(OP)
Is there any sensors that will detect pre-sputtered wafers before they enter into a oxide etch chamber? (for the purpose of damage limitation to the etch process kit)
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RE: pre etching sensing
TTFN
RE: pre etching sensing
RE: pre etching sensing
TTFN
RE: pre etching sensing
I'm not sure if I can make it any clearer than this, but in general a sensor that will detect a very small layer of metal and will be oblivious to silicon??
RE: pre etching sensing
TTFN
RE: pre etching sensing
RE: pre etching sensing
If the operators are that unreliable, the production line is doomed and there will no longer be a viable customer to sell to.
In any case, if you want to add the cost and complexity, then you shuold integrated the film thickness monitor into your machine's processing.
TTFN