Why Ar decrease filament current for Ion Implantation?
Why Ar decrease filament current for Ion Implantation?
(OP)
As we know, filament current is one of the key monitor item for implanter.
Anyone know why Ar decreases filament current while Ge increases filament current for Ion Implantation?
Thanks in advance
Anyone know why Ar decreases filament current while Ge increases filament current for Ion Implantation?
Thanks in advance





RE: Why Ar decrease filament current for Ion Implantation?
Horacio